Goal: Nanomechanics is an important part of applied nanotechnology, This course will provide a working knowledge of nano-mechanics and nano-tribology emphasizing the role of surfaces, interfaces, defects, roughness, and quantum effects. Nano-mechanical measurements techniques and applications in micro-electronic technologies and nano-manufactoring will be developped.
1. Overview and preliminaries.
Surface topography ; roughness models and parameters ; measurements and characterization.
Surface interactions ; Van der Waals long range forces ; Derjaguin approximation, measuring surfaces forces SFA AFM.
2. Mechanics of solid contacts.
Single contact: Herz contact ; mechanics of adhesive contacts.
Statistics of contacts: Greenwood-Williamson model ; elasto-plastic contact
3. Beams, plates, and MEMS applications
Elastic energy ; equilibrium and dynamic equations ; competition with adhesion ; applications to NEMS. Exercice class (AFM cantilever or NEMS oscillators).
4. Surface energy of solids
Measurement methods ; hysteresis and aging ; stress corrosion. Exercice class.
5. Friction an lubrication
Amonton's law and Coulomb friction ; Tabor 's model of friction. Static and dynamic friction ; stick-slip ; Rice and Ruina law's of friction. Lubrication regimes, Reynolds equation, squeeze film lubrication. Exercice class.
6. Applications in micro-electronics
Direct bonding, wetting ; bonding wave dynamics Mechanics of fracture ; smartcut process
Published on April 11, 2019 Updated on December 2, 2020
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